00988naa#a2200193#i#4500001001500000003001700015005001700032100004100049102000700090200016500097210013700262215001000399608003700409675024500446700002300691700002100714700002100735856003800756EN\\bibl\12398/en/manage/index20250906123735.6##a20240917b2024####ek#y0engy0150####ca##aRU1#aONE-DIMENSIONAL DISTRIBUTION OF IMPURITY IN SILICON AND GERMANY WITH ION IMPLANTATION ACCORDING TO THE LINKHARD-SCHARF-SCHIOTTE MODELeConference article/thesis1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2024##a6 с.##aConference article/thesis2local##aЭлектроника. Фотоэлектроника. Электронные лампы, трубки. Рентгенотехника. Ускорители частиц. 621.38aМатериалы. Материаловедение. 620.22#1aPlotnikovagE. Yu.#1aVinokurovgA. A.#1aArsent'evgA. V.4#afht.editorum.ruu/en/manage/index