00644naa#a2200169#i#4500001001500000003001700015005001700032100004100049102000700090200010400097210013700201215001000338608003700348675003400385700001700419856003800436EN\\bibl\12394/en/manage/index20250508014655.4##a20240917b2024####ek#y0engy0150####ca##aRU1#aDEVELOPMENT AND RESEARCH OF TECHNOLOGY PLASMOCHEMICAL ETCHING OF SILICONeConference article/thesis1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2024##a8 с.##aConference article/thesis2local##aТравление. 621.794.4#1aGusevgP. E.4#afht.editorum.ruu/en/manage/index