00709naa#a2200205#i#4500001001500000003001700015005001700032011001400049100004100063101000800104102000700112200011100119210010800230215001100338608002700349675003800376700002400414700002700438856003800465EN\\bibl\52882/en/manage/index20250605000711.4##a2587-9936##a20190925b2019####ek#y0engy0150####ca0#aRUS##aRU1#aSize effects in the processes of large ion implantation into n-GaAs(100) epitaxial layerseJournal article1#aSevastopolcFederal State Educational Institution of Higher Education Sevastopol State Universityd2019##a10 с.##aJournal article2local##aфизические. 53.043zRUS#1aTorkhovgNikolay A #1aKrivchukgAleksandr S 4#afht.editorum.ruu/en/manage/index