00891naa#a2200229#i#4500001001500000003001700015005001700032011001400049100004100063102000700104200012500111210013700236215001000373608002700383675006700410700002000477700003700497700002400534700003300558700003200591856003800623EN\\bibl\41062/en/manage/index20251006054708.1##a2219-0767##a20201207b2020####ek#y0engy0150####ca##aRU1#aFEATURES OF THE TECHNOLOGICAL PROCESS OF MANUFACTURING SPACE-BASED MICROCHIPS USING CMOS KNS TECHNOLOGYeJournal article1#aVoronezhcFSBE Institution of Higher Education Voronezh State University of Forestry and Technologies named after G.F. Morozovd2020##a5 с.##aJournal article2local##aПрикладные науки. Общие вопросы. 60#1aZolnikovgV. K.#1aEvdokimovagSvetlana Anatol'evna#1aZHuravlyevagIrina #1aMaklakovagElena Al'bertovna#1aIluninagAnna Aleksandrovna4#afht.editorum.ruu/en/manage/index